Development of 3D Force Sensors for Nanopositioning and Nanomeasuring Machine
نویسندگان
چکیده
منابع مشابه
Development of 3D Force Sensors for Nanopositioning and Nanomeasuring Machine
In this contribution, we report on different miniaturized bulk micro machined three-axes piezoresistive force sensors for nanopositioning and nanomeasuring machine (NPMM). Various boss membrane structures, such as one boss full/cross, five boss full/cross and swastika membranes, were used as a basic structure for the force sensors. All designs have 16 p-type diffused piezoresistors on the surfa...
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ژورنال
عنوان ژورنال: Sensors
سال: 2009
ISSN: 1424-8220
DOI: 10.3390/s90503228